FE-SEM, 광학 현미경, AFM, NSOM, XPS, GDS
MSP, Micro PL-Raman, Confocal PL/Raman, PL Mapper, UV-vis, EL Probe Staion
WorkStation
MicroLED PL/EL Cluster, NaPLATO 2D 분광방사선계, Micro LED EL 프로브 스테이션, 열반사 현미경
DI Water Generator, Ultrasoniccator, O2plasma deaner, Spin Coater, Mask Aligner, OM, Alpha Step
Ion-beam assited Sputter,DC/RF Sputter, Thermal Evaporator, E-Beam Evaporator, ALD, RIE, RTP, Asher